TY - THES ID - 3257003 TI - Scanning spreading resistance microscopy for the characterization of advanced silicon devices AU - Álvarez, David AU - Katholieke Universiteit Leuven PY - 2007 SN - 9789056827748 PB - Leuven Katholieke Universiteit Leuven DB - UniCat KW - 620.186 <043> KW - Academic collection KW - Microscopic examination. Observation of structure, texture--Dissertaties KW - Theses UR - https://www.unicat.be/uniCat?func=search&query=sysid:3257003 AB - ER -