TY - BOOK ID - 32074328 TI - Silicon Anodization as a Structuring Technique : Literature Review, Modeling and Experiments PY - 2018 SN - 3658192380 3658192372 PB - Wiesbaden : Springer Fachmedien Wiesbaden : Imprint: Springer Vieweg, DB - UniCat KW - Engineering. KW - Thermodynamics. KW - Heat engineering. KW - Heat transfer. KW - Mass transfer. KW - Nanotechnology. KW - Nanotechnology and Microengineering. KW - Mathematical and Computational Engineering. KW - Engineering Thermodynamics, Heat and Mass Transfer. KW - Electrolytic oxidation. KW - Anodic oxidation KW - Electro-oxidation KW - Oxidation, Electrolytic KW - Electrolysis KW - Oxidation KW - Engineering mathematics. KW - Engineering KW - Engineering analysis KW - Mathematical analysis KW - Construction KW - Industrial arts KW - Technology KW - Mathematics KW - Applied mathematics. KW - Mass transport (Physics) KW - Thermodynamics KW - Transport theory KW - Heat transfer KW - Thermal transfer KW - Transmission of heat KW - Energy transfer KW - Heat KW - Mechanical engineering KW - Chemistry, Physical and theoretical KW - Dynamics KW - Mechanics KW - Physics KW - Heat-engines KW - Quantum theory KW - Molecular technology KW - Nanoscale technology KW - High technology UR - https://www.unicat.be/uniCat?func=search&query=sysid:32074328 AB - Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries. ER -