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TY  - BOOK
ID  - 27289430
TI  - Elektron beam interactions with solids for microscopy, microanalysis and microlithography: proceedings of the Pfefferkorn Conference, held April 18 to 23, 1982, at Monterey, CA
AU  - Kyser, David F.
AU  - Niedrig, Heinz
AU  - Newbury, Dale E.
AU  - Pfefferkorn Conference 
PY  - 1984
SN  - 0931288304
PB  - AMF O'Hare, Ill. Scanning Electron Microscopy
DB  - UniCat
KW  - 543.063 <063>
KW  - Solids
KW  - -Electron beams
KW  - -Backscattering
KW  - -Microlithography
KW  - -Electron energy loss spectroscopy
KW  - -Electrons
KW  - -Corpuscular theory of matter
KW  - Atoms
KW  - Leptons (Nuclear physics)
KW  - Matter
KW  - Particles (Nuclear physics)
KW  - Cathode rays
KW  - Ions
KW  - Positrons
KW  - EELS (Spectrum analysis)
KW  - Energy loss spectroscopy, Electron
KW  - Spectroscopy, Electron energy loss
KW  - Electron spectroscopy
KW  - Lithography
KW  - Microtechnology
KW  - Back scatter
KW  - Scattering (Physics)
KW  - Beams, Electron
KW  - Electron optics
KW  - Electronics
KW  - Particle beams
KW  - Solid state physics
KW  - Transparent solids
KW  - 543.063 <063> Analytical chemistry--?.063--Congressen
KW  - Analytical chemistry--?.063--Congressen
KW  - Effect of radiation on
KW  - -Congresses
KW  - Congresses
KW  - Backscattering
KW  - Constitution
KW  - Electron beams
KW  - Electron energy loss spectroscopy
KW  - Microlithography
KW  - Faisceaux électroniques
KW  - Scattering
KW  - Diffusion
KW  - Faisceaux électroniques
KW  - Electronics and optics of solids
KW  - Electrons
KW  - Congrès
KW  - Congresses.
UR  - https://www.unicat.be/uniCat?func=search&query=sysid:27289430
AB  - 
ER  -