TY - BOOK ID - 2391412 TI - Handbook of contamination control in microelectronics : principles, applications and technology PY - 1988 VL - vol *5 SN - 0815511515 9780815511519 PB - Park Ridge Noyes Publications DB - UniCat KW - Contaminatie (Technologie) KW - Contamination (Technologie) KW - Contamination (Technology) KW - Integrated circuits KW - Design and construction KW - Impurities (Technology) KW - Industrial contamination KW - Particulate contamination in industry KW - Factory sanitation KW - Design and construction. KW - Contamination (Technology). KW - Integrated circuits - Design and construction. KW - Integrated circuits - Design and construction UR - https://www.unicat.be/uniCat?func=search&query=sysid:2391412 AB - ER -