TY - BOOK ID - 218597 TI - Reactive sputter deposition AU - Depla, D. AU - Mahieu, S. PY - 2008 SN - 1281512788 9786611512781 3540766642 3540766626 3642095364 9783540766629 PB - Berlin : Springer, DB - UniCat KW - Cathode sputtering (Plating process) KW - Thin films. KW - Films, Thin KW - Solid film KW - Solid state electronics KW - Solids KW - Surfaces (Technology) KW - Coatings KW - Thick films KW - Ion plating KW - Metallic films KW - Sputtering (Physics) KW - Vapor-plating KW - Surfaces (Physics). KW - Chemistry, Physical organic. KW - Chemical engineering. KW - Surfaces and Interfaces, Thin Films. KW - Condensed Matter Physics. KW - Physical Chemistry. KW - Industrial Chemistry/Chemical Engineering. KW - Chemistry, Industrial KW - Engineering, Chemical KW - Industrial chemistry KW - Engineering KW - Chemistry, Technical KW - Metallurgy KW - Chemistry, Physical organic KW - Chemistry, Organic KW - Chemistry, Physical and theoretical KW - Physics KW - Surface chemistry KW - Materials—Surfaces. KW - Condensed matter. KW - Physical chemistry. KW - Chemistry, Theoretical KW - Physical chemistry KW - Theoretical chemistry KW - Chemistry KW - Condensed materials KW - Condensed media KW - Condensed phase KW - Materials, Condensed KW - Media, Condensed KW - Phase, Condensed KW - Liquids KW - Matter KW - Cathode sputtering (Plating process). UR - https://www.unicat.be/uniCat?func=search&query=sysid:218597 AB - The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to: - start with reactive magnetron sputtering - understand and investigate the technique - control their sputtering process - tune their existing process, obtaining the desired thin films. ER -