TY - BOOK ID - 208509 TI - Integrated chemical microsensor systems in CMOS technology PY - 2005 SN - 1280306173 9786610306176 3540273727 3540237828 3642062741 PB - Berlin ; New York : Springer, DB - UniCat KW - Metal oxide semiconductors, Complementary. KW - Microelectromechanical systems. KW - Sensorimotor integration. KW - Integration, Sensorimotor KW - Intersensory integration KW - Perceptual-motor integration KW - Sensimotor integration KW - Sensory integration KW - Sensory-motor integration KW - Perceptual-motor processes KW - Sensory integration dysfunction KW - MEMS (Microelectromechanical systems) KW - Micro-electro-mechanical systems KW - Micro-machinery KW - Microelectromechanical devices KW - Micromachinery KW - Micromachines KW - Micromechanical devices KW - Micromechanical systems KW - Electromechanical devices KW - Microtechnology KW - Mechatronics KW - CMOS (Electronics) KW - Complementary metal oxide semiconductors KW - Semiconductors, Complementary metal oxide KW - Digital electronics KW - Logic circuits KW - Transistor-transistor logic circuits KW - Nanotechnology. KW - Analytical biochemistry. KW - Optical materials. KW - Surfaces (Physics). KW - Electronics. KW - Analytical Chemistry. KW - Optical and Electronic Materials. KW - Surfaces and Interfaces, Thin Films. KW - Measurement Science and Instrumentation. KW - Electronics and Microelectronics, Instrumentation. KW - Electrical engineering KW - Physical sciences KW - Physics KW - Surface chemistry KW - Surfaces (Technology) KW - Optics KW - Materials KW - Analytic biochemistry KW - Biochemistry KW - Chemistry, Analytic KW - Molecular technology KW - Nanoscale technology KW - High technology KW - Bioanalytic chemistry KW - Bioanalytical chemistry KW - Analytical chemistry KW - Analytical chemistry. KW - Electronic materials. KW - Materials—Surfaces. KW - Thin films. KW - Physical measurements. KW - Measurement   . KW - Microelectronics. KW - Measurements, Physical KW - Mathematical physics KW - Measurement KW - Films, Thin KW - Solid film KW - Solid state electronics KW - Solids KW - Coatings KW - Thick films KW - Electronic materials KW - Analysis, Chemical KW - Analytic chemistry KW - Chemical analysis KW - Chemistry KW - Microminiature electronic equipment KW - Microminiaturization (Electronics) KW - Electronics KW - Semiconductors KW - Miniature electronic equipment KW - Measuring KW - Mensuration KW - Mathematics KW - Technology KW - Metrology KW - Physical measurements UR - https://www.unicat.be/uniCat?func=search&query=sysid:208509 AB - This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field. After a brief introduction, the fundamentals of chemical sensing are presented. Fabrication and processing steps that are commonly used in the semiconductor industry are then detailed followed by a short description of the microfabrication techniques, and of the CMOS substrate and materials. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures for chemical sensors is given. CMOS-technology is then introduced as platform technology, which enables the integration of these microtransducers with the necessary driving and signal conditioning circuitry on the same chip. In a next section, the development of monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces is described. A short section on packaging shows that techniques from the semiconductor industry can be applied to chemical microsensor packaging. The book concludes with a brief outlook on future developments, such as the realization of more complex integrated microsensor systems and methods to interface biological materials, such as cells, with CMOS microelectronics. ER -