TY - BOOK ID - 146148395 TI - 1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA AU - Cheung, Kin P AU - Nakamura, Moritaka AU - Gabriel, Calvin T. AU - International Symposium on Plasma Process-Induced Damage AU - American Vacuum Society AU - IEEE Electron Devices Society PY - 1997 PB - [Place of publication not identified] Northern California Chapter of the American Vacuum Society DB - UniCat KW - Semiconductor wafers KW - Semiconductors KW - Plasma etching KW - Electrical & Computer Engineering KW - Electrical Engineering KW - Engineering & Applied Sciences KW - Defects KW - Effect of radiation on KW - Congresses. UR - https://www.unicat.be/uniCat?func=search&query=sysid:146148395 AB - ER -