TY - BOOK ID - 145911373 TI - Foundations of MEMS PY - 2012 SN - 9780132497367 0132497360 PB - Upper Saddle River, N.J. : Prentice Hall, DB - UniCat KW - Microelectromechanical systems. UR - https://www.unicat.be/uniCat?func=search&query=sysid:145911373 AB - ER -