TY - THES ID - 139061840 TI - Studies of the effects of side walls on VLSI semiconductor devices. AU - Guo, Xin Sheng AU - State university of New York at Albany. Department of physics PY - 1992 PB - Ann Arbor University microfilms international DB - UniCat UR - https://www.unicat.be/uniCat?func=search&query=sysid:139061840 AB - ER -