TY - BOOK ID - 138536889 TI - Optical microlithography XXI. PY - 2008 SN - 9780819471093 PB - Bellingham SPIE DB - UniCat KW - Integrated circuits KW - Manufacturing processes KW - Microlithography KW - X-ray lithography KW - Masks UR - https://www.unicat.be/uniCat?func=search&query=sysid:138536889 AB - ER -