TY - BOOK ID - 137258347 TI - IIT 2002 proceedings : ion implementation technology : 2002 14th International Conference on Ion Implantation Technology proceedings, Taos, New Mexico, USA, 22-27 September 2002 AU - Brown, Bob AU - International Conference on Ion Implantation Technology AU - Institute of Electrical and Electronics Engineers PY - 2002 PB - [Place of publication not identified] IEEE DB - UniCat KW - Semiconductors KW - Ion implantation KW - Semiconductor doping UR - https://www.unicat.be/uniCat?func=search&query=sysid:137258347 AB - ER -