TY - BOOK ID - 137145258 TI - Emerging lithographic technologies V. PY - 2001 SN - 0819440299 PB - Bellingham SPIE DB - UniCat KW - Lithography, Electron beam KW - Masks (Electronics) KW - Microlithography KW - X-ray lithography KW - X-rays KW - Industrial applications UR - https://www.unicat.be/uniCat?func=search&query=sysid:137145258 AB - ER -