TY - BOOK ID - 136616536 TI - Advanced etch technology for nanopatterning. PY - 2012 SN - 9780819489845 PB - Bellingham SPIE DB - UniCat KW - Lithography KW - Plasma etching UR - https://www.unicat.be/uniCat?func=search&query=sysid:136616536 AB - ER -