TY - BOOK ID - 136607108 TI - Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing PY - 1998 SN - 3540616721 PB - Berlin Springer DB - UniCat KW - Semiconductor wafers KW - Silicon KW - Surface preparation KW - Cleaning KW - Surfaces UR - https://www.unicat.be/uniCat?func=search&query=sysid:136607108 AB - ER -