TY - BOOK ID - 136482241 TI - Plasma processes for semiconductor fabrication. PY - 1999 SN - 0521591759 PB - Cambridge Cambridge University press DB - UniCat KW - Plasma etching KW - Semiconductors KW - Etching UR - https://www.unicat.be/uniCat?func=search&query=sysid:136482241 AB - ER -