TY - BOOK ID - 136198919 TI - Proceedings, International Conference on MEMS, NANO, and Smart Systems : July 20 to July 23, 2003, Banff, Alberta, Canada AU - Moussa, Walied AU - Badawy, Wael AU - International Conference on MEMS, NANO, and Smart Systems AU - IEEE Computer Society PY - 2003 PB - [Place of publication not identified] IEEE Computer Society DB - UniCat KW - Microelectromechanical systems KW - Nanotechnology KW - Nanoscience KW - Intelligent control systems KW - Smart materials UR - https://www.unicat.be/uniCat?func=search&query=sysid:136198919 AB - ER -