TY - BOOK ID - 136161133 TI - Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy AU - Crowley, Chris J. AU - Johnson, Aaron N. AU - Pope, Jodie G. AU - Wright, John D. AU - Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.)) PY - 2014 PB - Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, DB - UniCat KW - Metrology. KW - Microscopy. UR - https://www.unicat.be/uniCat?func=search&query=sysid:136161133 AB - ER -