TY - BOOK ID - 135906863 TI - 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada AU - Gelpey, Jeffrey C AU - International Conference on Advanced Thermal Processing of Semiconductors AU - IEEE Electron Devices Society PY - 2002 PB - [Place of publication not identified] IEEE DB - UniCat KW - Semiconductors KW - Rapid thermal processing KW - Semiconductor doping KW - Heat treatment KW - Defects UR - https://www.unicat.be/uniCat?func=search&query=sysid:135906863 AB - ER -