TY - BOOK ID - 135758326 TI - Emerging lithographic technologies. PY - 1997 SN - 0819424625 PB - Bellingham SPIE DB - UniCat KW - Electron beams KW - Lithography, Electron beam KW - Masks (Electronics) KW - X-ray lithography KW - X-rays KW - Industrial applications KW - Congresses KW - Congresses KW - Congresses KW - Congresses KW - Industrial applications KW - Congresses UR - https://www.unicat.be/uniCat?func=search&query=sysid:135758326 AB - ER -