TY - BOOK ID - 134732340 TI - RF MEMS : theory, design, and technology. PY - 2003 SN - 0471201693 PB - Hoboken Wiley DB - UniCat KW - Microelectromechanical systems KW - Very high speed integrated circuits UR - https://www.unicat.be/uniCat?func=search&query=sysid:134732340 AB - ER -