TY - BOOK ID - 134701002 TI - Proceedings of the symposia on Patterning science and technology II and Interconnection and contact metallization for ULSI AU - Greene, Wayne AU - Herndon, Terry O. PY - 1992 SN - 1566770076 PB - Pennington Electrochemical society DB - UniCat KW - Integrated circuits KW - Lithography KW - Metallizing KW - Microelectronic packaging KW - Ultra large scale integration KW - Design and construction KW - Congresses KW - Congresses KW - Congresses KW - Congresses UR - https://www.unicat.be/uniCat?func=search&query=sysid:134701002 AB - ER -