TY - BOOK ID - 134609373 TI - Electromigration in ULSI interconnections PY - 2010 SN - 1283143712 9786613143716 9814273333 9789814273336 9789814273329 9814273325 9781283143714 PB - Hackensack, N.J. : World Scientific, DB - UniCat KW - Integrated circuits KW - Electrodiffusion. KW - Ultra large scale integration. UR - https://www.unicat.be/uniCat?func=search&query=sysid:134609373 AB - ""Electromigration in ULSI Interconnections"" provides a comprehensive description of the electro migration in integrated circuits. It is intended for both beginner and advanced readers on electro migration in ULSI interconnections. It begins with the basic knowledge required for a detailed study on electro migration, and examines the various interconnected systems and their evolution employed in integrated circuit technology. The subsequent chapters provide a detailed description of the physics of electro migration in both Al- and Cu-based Interconnections, in the form of theoretical, experim ER -