TY - BOOK ID - 134509753 TI - 2002 International Conference on Microelectronic Test Structures PY - 2002 PB - [Place of publication not identified] I E E E DB - UniCat KW - Microelectronics UR - https://www.unicat.be/uniCat?func=search&query=sysid:134509753 AB - ER -