TY - GEN digital ID - 131862817 TI - Levitation Micro-Systems : Applications to Sensors and Actuators PY - 2021 SN - 9783030589080 9783030589097 9783030589103 9783030589073 PB - Cham Springer International Publishing DB - UniCat KW - Applied physical engineering KW - detectoren KW - mechanische technologie UR - https://www.unicat.be/uniCat?func=search&query=sysid:131862817 AB - This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements. ER -