TY - GEN digital ID - 131375384 TI - Design and Manufacturing of Active Microsystems AU - Büttgenbach, Stephanus AU - Burisch, Arne AU - Hesselbach, Jürgen PY - 2011 SN - 9783642129032 PB - Berlin, Heidelberg Springer Berlin Heidelberg DB - UniCat KW - Chemical structure KW - Electrical engineering KW - Materials processing KW - Biotechnology KW - nanotechniek KW - biotechnologie KW - productieprocessen UR - https://www.unicat.be/uniCat?func=search&query=sysid:131375384 AB - ER -