TY - BOOK ID - 130328340 TI - Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984 AU - Ziegler, James F. AU - Brown, R. L. AU - International conference on ion implantation equipment and techniques (5th : 1984 : Jeffersonville, Vt.) PY - 1985 PB - Amsterdam: North-Holland, DB - UniCat KW - Ion implantation KW - Semiconductor doping UR - https://www.unicat.be/uniCat?func=search&query=sysid:130328340 AB - ER -