TY - BOOK ID - 129522531 TI - Metastable ScAlN and YAlN Thin Films Grown by Reactive Magnetron Sputter Epitaxy. PY - 2014 SN - 9175194341 9789175194349 PB - Linköping : Linköping University Electronic Press, DB - UniCat KW - Piezoelectric materials. KW - Thin films. UR - https://www.unicat.be/uniCat?func=search&query=sysid:129522531 AB - This dissertation explores the synthesis and characterization of metastable thin films of ScAlN and YAlN, focusing on their structural, electrical, optical, and mechanical properties. Utilizing reactive magnetron sputter epitaxy, the study investigates the effects of varying scandium and yttrium concentrations on the piezoelectric and other material properties. The research highlights the potential for enhanced piezoelectric responses and improved crystalline quality by adjusting growth temperatures and material compositions. The findings provide insights into creating new materials with advanced functionalities, with implications for technological applications such as thin film bulk acoustic wave resonators. This work is intended for researchers and professionals in material science and thin film technology. ER -