TY - BOOK ID - 129504710 TI - Precursors and defect control for halogenated CVD of thick SiC epitaxial layers PY - 2014 SN - 9175192136 PB - Linköping, Sweden : Linköping University, DB - UniCat KW - Silicon carbide KW - Research. UR - https://www.unicat.be/uniCat?func=search&query=sysid:129504710 AB - ER -