TY - BOOK ID - 128392751 TI - Handbook of advanced plasma processing techniques AU - Shul, R. J. AU - Pearton, Stephen J. PY - 2000 SN - 3540667725 PB - Berlin ; New York : Springer, DB - UniCat KW - Electronic circuits. KW - Integrated circuits KW - Plasma engineering. KW - Plasma etching. KW - Plasma spraying. KW - Design and construction. UR - https://www.unicat.be/uniCat?func=search&query=sysid:128392751 AB - ER -