TY - BOOK ID - 127227194 TI - Ion tracks and microtechnology : principles and applications AU - Spohr, Reimar AU - Bethge, Klaus PY - 1990 SN - 9783528063306 3528063300 PB - Braunschweig: Vieweg, DB - UniCat KW - Materials KW - Ion bombardment KW - Ion beam lithography UR - https://www.unicat.be/uniCat?func=search&query=sysid:127227194 AB - ER -