TY - BOOK ID - 12252159 TI - MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006 AU - IEEE International Conference on Micro Electro Mechanical Systems AU - IEEE Robotics and Automation Society PY - 2006 SN - 0780394755 1509090703 9781509090709 PB - [Place of publication not identified] IEEE DB - UniCat UR - https://www.unicat.be/uniCat?func=search&query=sysid:12252159 AB - ER -