TY - BOOK ID - 1213042 TI - Ion implantation: science and technology PY - 1984 SN - 0127806202 0323144012 1299366198 PB - Orlando Academic Press DB - UniCat KW - Electronics and optics of solids KW - Ion implantation KW - Implantation, Ion KW - Ion bombardment KW - Ion plating UR - https://www.unicat.be/uniCat?func=search&query=sysid:1213042 AB - ER -